CMOS-Compatible High Resolution Spatial Heterodyne Spectrometer Based on Si 3 N 4 /SiO 2 Waveguide

We experimentally demonstrated an integrated spatial heterodyne spectrometer fabricated on double-strip TriPleX waveguide technology. The TriPleX waveguide has a very low loss and tight bend so that the spectrometer realizes a high resolution of 0.023 nm across a wavelength range of 0.184 nm at 1550 nm in a small footprint of 4 mm × 8 mm. Moreover, the proposed integrated spectrometer combines the...