Plasma-polymerized Particles from Organosilane Molecules and Microstructure of Their Deposits
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY(2016)
摘要
This study investigated the size, dispersion and agglomeration of the microparticles deposited by PECVD.
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关键词
chemical vapor deposition,capacitively-coupled plasma,SiO:CH,trimethylmethoxysilane,self-organized structure
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