Feedback Control With Feedforward Sequence For Nanopositioning System

Fast and accurate tracking of reference trajectories is highly desirable in many nanopositioning systems, such as piezoelectric tube scanner(PTS), atomic force microscopes(AFMs) and so on. In this paper, notch filter is designed to attenuate the gain at resonant frequency. Comparing with damping controller, notch filter is designed easier and has better performance. What's more, a fast control algorithm is proposed to promote response time. To attain fast and accurate control, the approach that contains notch filter and fast control algorithm is used in the practice system. The results have been verified in our experimental platform and show that this method has better tracking effect compared with PID control or notch filter PID control.