Study of Oxygen Concentration in TMAH Solution for Improvement of Sigma-Shaped Wet Etching Process

Yong Gen He,Huan Xin Liu,Jia Lei Liu,Jin Gang Wu, Christian Haigermoser, Feng Liu, Mei Sheng Zhou, Wei Lu

Solid State Phenomena（2016）

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摘要

Tetramethylammonium hydroxide (TMAH) is a common etchant for Sigma shape formation in IC manufacturing. The impact of oxygen dissolved in TMAH solution on process was studied in this paper. A novel O2 gas injector was developed to improve the process stabilization by control of the oxygen concentration in TMAH solution

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关键词

TMAH,sigma wet etching,oxygen

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