Fine angular positioning with ultrasonic motor

Experimental results on ultrasonic motor speed and angular displacement characteristics are presented and discussed. A prototype of a traveling wave ultrasonic motor has been constructed to operate in the 10 th vibration mode, at f=82,75kHz. Its response is analyzed for several conditions of input voltage, burst modulation cycle, and rotor-stator friction force. The purpose of this investigation is to define a proper input parameters range for controlling the rotor's movement, aiming micro/nano-positioning applications.