High-sensitivity microelectromechanical systems-based tri-axis force sensor for monitoring cellular traction force

A high-sensitivity tri-axis force sensor designed to measure the traction force of a single cell is reported. The developed sensor consists of a micropillar that is supported by a cross-shaped Si structure and a double-layer photoresist cap. The piezoresistors formed on the Si structure allow for the simultaneous measurement of the normal and shear forces acting on the micropillar. Moreover, the c...