3d Nanopore Shape Control By Current-Stimulus Dielectric Breakdown

We propose a simple and cost-effect method, current-stimulus dielectric breakdown, to manipulate the 3D shapes of the nanochannels in 20-nm-thick SiNx membranes. Besides the precise control of nanopore size, the cone orientation can be determined by the pulse polarity. The cone angle of nanopores can be systematically tuned by simply changing the stimulus pulse waveform, allowing the gradual shape control from conical to obconical. After they are formed, the cone angle of these nanopores can be further tuned in a certain range by adjusting the widening pulse. Such size and 3D shape controllable abiotic nanopores can construct a constriction in the nanochannel and hence produce a sub-nm "sensing zone" to suit any desired bio-sensing or precise DNA sequencing. Using these conical nanopores, 20-nt ssDNA composed of homopolymers (poly(dA)(20), poly(dC)(20), and poly(dT)(20)) can be clearly differentiated by their ionic current signals. Published by AIP Publishing.