Analysis of micro-Raman spectra combined with FDTD electromagnetic simulation and FEM stress simulation for local stress distribution in Si MOSFETs

Tetsuya Tada,A. Satoh,Hiroshi Arimoto,Koichi Fukuda, K. Fujita,Toshihiko Kanayama

The Japan Society of Applied Physics（2012）

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摘要

2012 International Conference on Solid State Devices and Materials,Analysis of micro-Raman spectra combined with FDTD electromagnetic simulation and FEM stress simulation for local stress distribution in Si MOSFETs

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关键词

fem stress simulation,stress distribution,local stress distribution,micro-raman

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