Effect of substrate temperature on the structure, electrical and optical properties of Mo doped ZnO films

•MZO thin films were prepared by RF magnetron sputtering from ZnO target and DC magnetron sputtering from Mo target.•All films are polycrystalline with preferential c-axis growth.•The various properties of films fabricated at varied substrate temperature have been studied.•The valence of the Mo ions in the ZnO matrix is mixture of +5 and +6.