Conceptual Design and Trajectory Planning of a Precision Repetitive-Scanning Stage With Separated Drive Unit for Energy Saving

Precision repetitive-scanning stages, which exist in lithographic reticle systems, scanning probe microscopes, and scanning electrodischarge machines, have been widely used in modern precision industry. To design such stages, energy consumption has become one of the most important criteria due to energy crisis and practical heat-reduction request. Considering the motion characteristics of such sta...