Conceptual Design and Trajectory Planning of a Precision Repetitive-Scanning Stage With Separated Drive Unit for Energy Saving
IEEE/ASME Transactions on Mechatronics(2016)
摘要
Precision repetitive-scanning stages, which exist in lithographic reticle systems, scanning probe microscopes, and scanning electrodischarge machines, have been widely used in modern precision industry. To design such stages, energy consumption has become one of the most important criteria due to energy crisis and practical heat-reduction request. Considering the motion characteristics of such sta...
更多查看译文
关键词
Trajectory,Force,Acceleration,Planning,Energy consumption,IEEE transactions,Mechatronics
AI 理解论文
溯源树
样例
![](https://originalfileserver.aminer.cn/sys/aminer/pubs/mrt_preview.jpeg)
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要