Hybrid Dielectric Thin Films on Flexible Substrates for Embedded Capacitor Applications

This paper describes a novel fabrication process and technology for making hybrid thin film capacitors on flexible metallic substrates using vapor deposition process (polymer multilayer) and RF sputtering. In this case, polymeric acrylate thin films are deposited on flexible base metal foils (Cu) using a vapor deposition process followed by inorganic yttria stabilized zirconia thin films by RF spu...