Fabrication of UV-LIGA micro acceleration switch

A kind of micro acceleration switch is presented in this paper. The switch is consisted of proof mass, tether beam, contact electrode and self lock/unlock components. General FEA (Finite Element Analysis) tools such as Ansys is used to calculate appropriate structure parameters in design. The switch is fabricated by three layer process with Pyrex base as well as UV LI GA and sacrifice layer technology. By testing a comparative good switching performance is achieved to meet the design requirements.