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CrN/ZrN多层梯度薄膜的合成

刘峰,刘谦祥,李德军

Journal of Tianjin Normal University（2004）

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Abstract
利用直流磁控溅射技术,应用双靶轮流反应溅射工艺,制备了CrN/ZrN多层梯度薄膜.采用XRD,AES,XPS和纳米硬度仪等测试方法,对CrN/ZrN多层梯度薄膜的微观结构和纳米硬度进行了研究.结果表明:在N2反应气体环境下通入更具活性的NH3气体所合成的薄膜结构中ZrN和CrN结晶趋向多元化共存,其纳米硬度明显提高.在0.6 mL/min(sccm) 的N2流量和0.15 mL/min的NH3流量条件下,薄膜纳米硬度达到35 Gpa.
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multilayered gradient crn/zrn
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