Chrome Extension
WeChat Mini Program
Use on ChatGLM
VIPCreated with Sketch.

纳米二氧化钛薄膜的磁控溅射制备和结构特性表征

刘彭义,张丽丽, 叶海,叶勤,唐振方

Journal of Jinan University（2004）

Cited 0|Views0
No score
Abstract
用磁控溅射方法制备出纳米二氧化钛(TiO2)薄膜,对制膜的工艺参数进行了详细的测试分析. X射线衍射(XRD)分析表明退火温度提高,TiO2薄膜结晶度增加,800℃下退火2 h,TiO2薄膜完全转化为金红石结构,其分子式为Ti8O15,出现氧空位.
More
Translated text
Key words
magnetron sputtering method,thin films,nano-titanium
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined