纳米二氧化钛薄膜的磁控溅射制备和结构特性表征
Journal of Jinan University(2004)
Abstract
用磁控溅射方法制备出纳米二氧化钛(TiO2)薄膜,对制膜的工艺参数进行了详细的测试分析. X射线衍射(XRD)分析表明退火温度提高,TiO2薄膜结晶度增加,800℃下退火2 h,TiO2薄膜完全转化为金红石结构,其分子式为Ti8O15,出现氧空位.
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Key words
magnetron sputtering method,thin films,nano-titanium
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