氟硅酸钠制备多晶硅研究进展
Bulletin of the Chinese ceramic society(2014)
Abstract
本文概述了多晶硅的用途、重要性和主要研究方法,重点介绍了采用氟硅酸钠制备多晶硅的方法,该方法由于能耗低、污染小将是具有良好发展前景的太阳能级多晶硅制备方法.论述了氟硅酸钠制备多晶硅的研究进展与存在的难点,并提出了要实现制备太阳能级多晶硅产业化需解决的问题.
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Key words
polycrystalline silicon prepared,sodium
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