氮化镓/蓝宝石异质结构中极性的研究
Chinese Journal of Luminescence（2001）
Abstract
用低压金属有机气相外延方法设备在蓝宝石衬底两个相反取向的C面上同时生长六方相氮化镓薄膜,对此进行了扫描电子显微镜、透射电子显微镜的分析和研究.发现当衬底表面是向籽晶面时,生长的六方相氮化镓薄膜为(0001)取向,而当衬底表面是背籽晶面时,生长的氮化镓薄膜则为(0001)取向.
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Key words
gan/al_2o_3heterostructure,gan/al_2o_3heterostructure
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