皮秒激光剥蚀固体进样系统的研制
Chinese Journal of Analysis Laboratory（2015）
Abstract
研制了一款皮秒激光剥蚀固体进样系统(psLA).该装置由激光器、激光束聚焦系统、样品池、气溶胶传输系统、观察系统、样品移动平台等几部分组成.激光器的输出波长可选,有1064,532,355和266 nm 4种,脉冲宽度30 ps,脉冲频率20 Hz.选用266 nm的波长进行性能表征,脉冲能量可达3.0mJ,剥蚀坑呈圆形,边缘陡峭,空间分辨率小于30μm,时间分辨率小于2 s,单位脉冲剥蚀量为20 nm.该装置与ICP-MS联用可实现固体样品的直接分析.
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Key words
Picosecond laser, Laser ablation, Inductively coupled plasma mass spectrometry, Solid sampling system
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