Swift heavy ion irradiation of metal containing tetrahedral amorphous carbon films

P. A. Karaseov,Vera Protopopova,K. V. Karabeshkin,E. N. Shubina,Maxim V. Mishin,Jari Koskinen,S. Mohapatra,A. Tripathi,D.K. Avasthi,A. I. Titov

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms（2016）

Cited 7|Views16

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Abstract

•ta-C films with Ni and Cu doping were grown using dual cathode filtered vacuum arc deposition.•Conductive channels were found in the films by C-AFM after irradiation with 100MeV Ag ions.•SEM contrast found after irradiation strongly depends on kind of metal impurity in the film.•Different chemical effect of Ni and Cu on transformation of carbon matrix under irradiation was revealed.

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Key words

Tetrahedral amorphous carbon,Metal doping,Swift heavy ion irradiation,Conductive channel formation,Conductive AFM

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