Quantitative Theory for Probe-Sample Interaction With Inhomogeneous Perturbation in Near-Field Scanning Microwave Microscopy

A general approach for calculating tip-sample capacitance variation in near-field scanning microwave microscopy is presented. It can be applied to arbitrary tip shapes, thick and thin films, and variation due to inhomogeneous perturbation. The computation domain for the tip-sample interaction problem is reduced to a block perturbation area by applying Green's theorem, and thus it can save substant...