Ultrasonic standing waves-driven high resolution rotary table
Precision Engineering(2016)
Abstract
•Cylinder shape piezoelectric element generates motion of a rotor.•Angular position of table is detected by integrated optical encoder.•Maximal displacements of contact zone elements almost coincide at nearly 125kHz.•Motion trajectory of contact zone elements is defined by elliptical curve.•Rotary table angular resolution equals approximately 8μrad in both directions.
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Key words
Ultrasonic standing waves,Angular resolution,Rotary table,Finite element analysis,Dynamic characteristics
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