A Closed-Loop Controlled Nanomanipulation System for Probing Nanostructures Inside Scanning Electron Microscopes

Probing nanostructures (e.g., nanoelectronics) requires accurate and precise nanopositioning. Furthermore, since measuring I-V data from dc to GHz typically takes more than a minute, tolerance for position drift is stringent during the data collection process. This paper reports a closed-loop controlled nanomanipulation system for operation inside a scanning electron microscope. A new position sen...