A Closed-Loop Controlled Nanomanipulation System for Probing Nanostructures Inside Scanning Electron Microscopes
IEEE/ASME Transactions on Mechatronics(2016)
Abstract
Probing nanostructures (e.g., nanoelectronics) requires accurate and precise nanopositioning. Furthermore, since measuring I-V data from dc to GHz typically takes more than a minute, tolerance for position drift is stringent during the data collection process. This paper reports a closed-loop controlled nanomanipulation system for operation inside a scanning electron microscope. A new position sen...
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Key words
Strain,Sensors,Scanning electron microscopy,Nanobioscience,Bridge circuits,Heating
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