Sub-30 nm CMOSFET with Ni(Pt)-FUSI/SiON Gate StackH. Fukutome,K. Okubo,S. Akiyama, N. Idani,Hiroyuki Ohta,Kazuo Kawamura,Y. Momiyama,S. SatohThe Japan Society of Applied Physics(2009)引用 0|浏览14暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要