RHEED Study of the Texture in Polycrystalline Films of Magnetite Grown on Oxidized Silicon Surface
Solid State Phenomena(2016)
摘要
Polycrystalline films of magnetite (Fe3O4) with thickness of 75 nm were grown on SiO2/Si (001) surface by reactive deposition of Fe in O2 atmosphere. The growth of Fe3O4 films was conducted with the different oxygen pressures. The structure of films was monitored by reflection high-energy electron diffraction (RHEED) during the film growth. It was found that there is a range of oxygen pressure in which the growth of only textured Fe3O4 film takes place. Reactive deposition of Fe at lower oxygen pressure results in a growth of Fe3O4 film without a texture. In contrast at the deposition with higher oxygen pressure the texture in the Fe3O4 film remains but the appearance of hematite (α-Fe2O3) is observed.
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关键词
magnetite grown,polycrystalline films,oxidized silicon surface,texture
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