Two-layer spin coating flow of Newtonian liquids: A computational study

Computers & Fluids(2016)

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摘要
•Numerical analysis of two-layer spin coating flow with capillary pressure effect.•Effect of model parameters and fluid properties on uniformity of film are studied.•Capillary ridges affect the uniformity of the final two-layer film.•A less viscous upper layer fluid results in a uniform two-layer film.•An equal amount of liquids in both the layers produces a uniform two-layer film.
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关键词
Axisymmetric flow,Mathematical modeling,Multi-layer coating,Precursor layer model,Thin-film flow,Two-layer spin coating
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