Synthesis Of Large Scale Graphene Oxide Using Plasma Enhanced Chemical Vapor Deposition Method And Its Application In Humidity Sensing

JOURNAL OF APPLIED PHYSICS(2016)

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摘要
Large scale graphene oxide (GO) is directly synthesized on copper (Cu) foil by plasma enhanced chemical vapor deposition method under 500 degrees C and even lower temperature. Compared to the modified Hummer's method, the obtained GO sheet in this article is large, and it is scalable according to the Cu foil size. The oxygen-contained groups in the GO are introduced through the residual gas of methane (99.9% purity). To prevent the Cu surface from the bombardment of the ions in the plasma, we use low intensity discharge. Our experiment reveals that growth temperature has important influence on the carbon to oxygen ratio (C/O ratio) in the GO; and it also affects the amount of pi-pi* bonds between carbon atoms. Preliminary experiments on a 6mm x 12mm GO based humidity sensor prove that the synthesized GO reacts well to the humidity change. Our GO synthesis method may provide another channel for obtaining large scale GO in gas sensing or other applications. (C) 2016 AIP Publishing LLC.
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