Piezoresistive Cantilever Integrated Microfluidic Channel For Measuring Cellular Properties

We propose a microfluidic device that has piezoresistive cantilever on the bottom wall of its microchannel to measure cellular mechanical property. This sensor allows us to measure force applied to the wall of microfluidic channel directly with high sensitivity and high temporal resolution. Moreover, feedback from the sensor can be used to control liquid flow above the cantilever. We demonstrate that our device is able to detect the force acting on the channel bottom wall during the passing-through of mammalian cells by the piezoresistive cantilever.