Measuring The Vibration Of Cells Subjected To Ultrasound Using A Mems-Based Force Sensor Array

Huijun Park,Nguyen Thanh-Vinh,Kayoko Hirayama,Takuya Tsukagoshi,Kentaro Noda, Tomoynki Takahaia,Kiyoshi Matsumoto,Isao Shimoyama

2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)（2016）

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摘要

This paper reports on a method to measure vibration occurring on the membrane of a mammalian cell which is subjected to ultrasound. The measurement is based on an array of piezoresistive MEMS force sensors. Experimental results with the fabricated sensors showed a change in frequency response to the ultrasound-induced vibration of NIH3T3 cells adhered to the fabricated sensor.

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关键词

cell vibration,MEMS-based force sensor array,mammalian cell membrane,piezoresistive MEMS force sensors,ultrasound-induced vibration,NIH3T3 cells

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