Case Study: A 63 year old Female with a Smoking History and Lung Nodules

New features of a three-dimensional non-contact digital optical profiler are described. This instrument uses a Michelson interferometer for 1.5X, 2.5X, and 5X objective magnifications, a Mirau interferometer for 10X, 20X, and 40X magnifications, and a Linnik objective for 100X, 150X, and 200X magnifications. The instrument is capable of a lateral resolution of 0.4 μm and a vertical resolution as small as 0.1 nm. The software can calculate various statistical roughness parameters for flat, cylindrical, and spherical surfaces. The radii of cylindrical and spherical surfaces can be measured with high accuracy. Flatness, crown, camber, twist, taper angle, pole-tip gap recession, and edge quality of magnetic slider surfaces can also be measured.