A novel GaN HEMT degradation mechanism observed during HTST test

2018 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM (IRPS)(2018)

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摘要
The maximum drain current (Imax) reduction after high temperature short term (HTST) tests in RF-GaN HEMT was investigated. A “critical-voltage” like degradation was observed with voltage levels correlated with the pinch-off voltage of the MIS structure formed by the device field-plate terminal (FP). The recoverable nature of the observed phenomena and the positive temperature dependence of both the Imax reduction and leakage currents within the passivation layer allowed us to propose a novel interpretation based on a charge-injection process from the FP into SiN/AlGaN electrons trap within the device gate-drain access region.
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关键词
HTST test,maximum drain current reduction,pinch-off voltage,MIS structure,device field-plate terminal,positive temperature dependence,leakage currents,RF HEMT,HEMT degradation mechanism,high temperature short term tests,critical-voltage like degradation,charge-injection process,GaN,SiN-AlGaN
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