A New Mechanism Of Signal Path Charging Damage Across Separated Power Domain Deep N-Well Interface

Yu-Lin Chu, Hsi-Yu Kuo, Sheng-Fu Hsu, Yung-Sheng Tsai,Ming-Yi Wang,Chuan-Li Chang,Bill Kiang,Kenneth Wu

2018 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM (IRPS)(2018)

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摘要
In this paper, a new mechanism of signal path charging damage is observed across a separated power domain interface from the non-DNW (Deep N-Well) to DNW region. This damage mechanism is unlike the damage outside DNW from the DNW to non-DNW region unveiled in our previous work. It is found that damage takes place inside the DNW and both NMOS and PMOS transistors are impacted instead of NMOS only. A model for the damage mechanism is proposed and verified comprehensively using test patterns in a 40nm logic process combined with SPICE simulations. Several protection schemes are proposed to avoid this new mechanism of charging damage.
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关键词
Charging damage, DNW, non-DNW, separated power domain interfaces
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