Precise geometric error model based on z -axis motion platform of micro v-groove machine tools

The z -axis motion platform is an important part of micro v-groove machine tools. A v-groove structure is the most important basic component of fiber array, dense wavelength division multiplexing device, fiber optic splitter, planar lightwave circuit, and so on. The core pitch of v-groove structure which determines the quality of micro v-groove is the most important machining parameter. Its machining precision is mostly dominated by the compensation accuracy of geometric error in the z -axis direction. The precise geometric error model of z -axis motion platform is the basis and key of precision compensation of geometric error. It is very difficult to calculate the precise geometric error with the traditional modeling method. A new modeling method of geometric error is proposed based on the z -axis motion platform of micro v-groove machine tools. The difference between the simultaneously events and the successively events is intuitively explained by comparing the new modeling method and the traditional modeling method. The results show that the new modeling method of geometric error based on the z -axis motion platform is effective and practical.