Comparison of the Thermal Degradation of Heavily Nb-Doped and Normal PZT Thin Films.

Jeong-Suong Yang, YunSung Kang, Inyoung Kang,SeungMo Lim, Seung-Joo Shin,JungWon Lee,Kang Heon Hur

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control（2017）

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摘要

The degradation of niobium-doped lead zirconate titanate (PZT) and two types of PZT thin films were investigated. Undoped PZT, two-step PZT, and heavily Nb-doped PZT (PNZT) around the morphotropic phase boundary were in situ deposited under optimum condition by RF-magnetron sputtering. All 2-μm-thick films had dense perovskite columnar grain structure and self-polarized (100) dominant orientation....

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关键词

Films,Electrodes,Measurement by laser beam,Sputtering,Degradation,Temperature measurement,Radio frequency

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