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Phase Noise Measurements of AlN Contour-Mode Resonators With Carrier Suppression Technique

Etienne Vaillant,Fabrice Sthal,Joël Imbaud,Valérie Soumann,Philippe Abbé,Lilia Arapan,Francois-Xavier Esnault,Gilles Cibiel,Jeronimo Segovia-Fernandez,Gianluca Piazza

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control（2018）

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Abstract
In this paper, the phase noise of aluminum nitride (AlN) contour-mode resonators is investigated using a passive measurement system with carrier suppression. The purpose is to make careful measurements of the performance of AlN resonators in order to better understand and clarify previously reported frequency instability in these devices. The resonant frequencies of the resonators are around 220 M...
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Key words
Resonators,Resonant frequency,Aluminum nitride,Noise measurement,III-V semiconductor materials,Temperature measurement,Pollution measurement
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