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Silicon Nanowire Field Effect Transistor Sensors with Minimal Sensor-to-Sensor Variations and Enhanced Sensing Characteristics.

Sufi Zafar,Christopher D'Emic,Ashish Jagtiani,Ernst Kratschmer,Xin Miao,Yu Zhu,Renee Mo,Norma Sosa,Hendrik Hamann,Ghavam Shahidi,Heike Riel

ACS Nano（2018）

Cited 70|Views77
Key words
CMOS-compatible fabrication,sensor-to-sensor variations,silicon nanowire field effect transistor sensors,potentiometric sensors,pH sensing
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