A hybrid 3D SEM reconstruction method optimized for complex geologic material surfaces.

Micron(2017)

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摘要
•A hybrid reconstruction method is developed combining stereo and shape-from-shading.•The method is optimized for extracting detail from rough natural surfaces.•Equations are derived based on secondary electron detector response.•A sphere image is used to calculate detector position and response.•The method is able to capture angular features, sharp edges, and surface striations.
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SEM,3D Reconstruction
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