窒素添加LaB₆ターゲットによる低仕事関数LaB₆スパッタ薄膜の形成 (シリコン材料・デバイス)
IEICE technical report. Speech(2015)
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined