Touch Sensor Application Of Spray Deposited Zno Films

2017 IEEE 26TH INTERNATIONAL SYMPOSIUM ON INDUSTRIAL ELECTRONICS (ISIE)(2017)

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摘要
We demonstrate touch sensor application of spray coated Zinc Oxide (ZnO) thin-films with submicron thickness (50-200 nm). The prepared ZnO films are characteristic with a wide optical transmittance window (80% similar to 97%) and a sheet resistance over 1500 ohm/square. The touch sensor was formed using a ZnO thin-film as an electrode attached to an oscillator circuit. The prepared touch sensors produce a significant change of the oscillation frequency in response to touch by human figure to ZnO electrodes. Thus feasibility of touch sensor application of spray deposited ZnO films is demonstrated. Thus, ZnO films may have an advantage over the conventional ITO electrodes due to a low cost and large area manufacturing by spray-coating technique.
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关键词
ZnO,solution process,spray pyrolysis,transparent conducting electrode,ITO alternative,touch detection,tactile sensor,capacitive touch,touch screen,touch pannel
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