Multilayer Fabrication Process For Josephson Junction Circuits Cross-Compatible Over Two Foundries
IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY(2016)
摘要
We have developed a thin-film fabrication process that allows for the manufacturing of Josephson-junction-based devices from the same layout data either in the VTT Technical Research Centre of Finland foundry in Espoo, Finland or in the FLUXONICS foundry at the Leibniz-Institut fur Photonische Technologien in Jena, Germany. Automated scripts are used to derive either VTT-compatible or FLUXONICS-compatible mask plates from the same layout data. Test circuits have been fabricated at both foundries from the same layout data and their correct operation verified.
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关键词
Josephson junctions (JJs), multiplexing, superconducting integrated circuits, superconducting radiation detectors
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