Analysis Of Effective Material Properties Of Metal Dummy Fills In A Cmos Chip
IEICE TRANSACTIONS ON COMMUNICATIONS(2017)
摘要
The equivalent anisotropic material parameters of metal dummy fills in a CMOS chip were extracted through an eigenmode analysis of a unit-cell of a space filled with metal dummies. The validity of the parameters was confirmed by comparing the S-parameters of a parallel-plate waveguide with the metal dummy fills and their effective material properties. The validity of the effective material properties was also confirmed by using them in a simulation of an on-chip dipole antenna.
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关键词
dummy metal fills, CMOS, effective material property, permittivity, permeability, millimeter-wave
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