Composition determination of multinary III/V semiconductors via STEM HAADF multislice simulations.

Lennart Duschek,Andreas Beyer,Jan Oliver Oelerich,Kerstin Volz

Ultramicroscopy（2018）

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摘要

•A new procedure for composition determination of III/V semiconductors is introduced.•The procedure is based on multislice STEM simulations.•Simulations have to be performed carefully to fit experimental images.•Static atomic displacements have to be taken into account.

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关键词

multinary iii/v,composition determination

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