12.2 A 7nm FinFET SRAM macro using EUV lithography for peripheral repair analysis.

Conventional patterning techniques, such as self-aligned double patterning (SADP) and litho-etch-litho-etch (LELE), have paved the way for the extreme ultraviolet (EUV) technology that aims to reduce the photomask steps [1,2]. EUV adds the extreme scaling to the high-performance of FinFET technology, thus opening up new opportunities for system-on-chip designers: delivering power, performance, and area (PPA) competitiveness. In terms of area, peripheral logic has scaled down aggressively in comparison to the bitcell given the intense design-rule shrinkage. Figure 12.2.1 shows the bitcell scaling trend and the peripheral logic unit area across different process nodes. Compared to the 10nm process node, the peripheral logic unit area is closer to the bitcell area in a 7nm process node aided by EUV, which allows bi-directional metal lines for scaling. Complex patterns and intensive scaling induce defective elements in the SRAM peripheral logic. Therefore, the probability of yield-loss due to defects is high, which necessitates the need for a repair scheme for the peripheral logic in addition to the SRAM bitcell. Despite the varied literature on bitcell repair, such as the built-in self-repair that analyzes the faulty bitcells to allocate the repair efficiently for a higher repairable rate [3], literature that discusses peripheral logic repair is sparse. Early literature [4] discusses the usage of a sense-amplifier, designed with redundancy, to address the sense-amplifier offset. Nevertheless, it is not related to the peripheral logic repair for yield improvement. This paper exclusively addresses the peripheral logic repair issue to achieve a higher repairable rate. A separate analysis of SRAM macro defect failures, in the bitcell and peripheral logic, provides a deeper understanding so as to increase the maximum repairable rate under random defect conditions.