Low-cost Non-etched Silicon Neural Probe
2019 9th International IEEE/EMBS Conference on Neural Engineering (NER)（2019）
Key words
local field potentials activity,microelectrode area,robust fabrication process,versatile fabrication process,silicon neural probe,low-cost semiconductor technologies,thin-films deposition,blade dicing,platinum microelectrodes impedance,electrochemical impedance spectroscopy,in-vivo electrophysiological recordings,platinum recording sites,long fabricated neural probe,photolithography,frequency 1.0 kHz,size 8.0 mm,Si
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