Fault isolation at P/N junction by nanoprober.

Precise location of leakage in a P-well/N-well junction has been identified by an AFM (atomic force microscope)-based nanoprober. In order to provide the accurate position of the failure for further analysis, a new method was proposed by combining nanoprobing I–V results on each P-well/N-well contact together with semi-empirical calculation to identify the possible leakage path. Further plan view TEM analysis confirms our result.