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排名必读论文期刊顶会热点AI 简史溯源树小脉星探人才迁徙塔尖人才国防情报追踪开源工具智慧手语
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Influence of Hydration and Fluctuating Structures at Surfaces of PVA Brush for Semiconductor Cleaning on Adsorption Behavior of Abrasive Grains Investigated by 3D-SFM

Takahiko Ikarashi,Takumi Yoshino,Kazuki Miyata,Keisuke Miyazawa,Megumi Uno,Chikako Takatoh,Takeshi Fukuma

The Japan Society of Applied Physics（2020）

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pva brush,semiconductor cleaning,adsorption behavior,abrasive grains,d-sfm
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