High-Speed Graphene Field Effect Transistors on Microbial Cellulose Biomembrane

IEEE Transactions on Nanotechnology(2017)

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摘要
For the goal of developing biocompatible sensors and electronics for in vivo applications, we report the first graphene field effect transistors (GFETs) fabricated on microbial cellulose (MBC), a biointegrative and ultraflexible biopolymer membrane. GFETs on MBC are fabricated in a wafer-scale using a transferred CVD graphene with a mobility of ${\rm{> 1700\,cm}}^{2}{\rm{/ Vs}}$ . With an excellent ohmic contact resistance of below ${\rm{0.1\,\Omega \,mm}}$, and a high transconductance of ${\rm{G}}_{{\rm{m}}}\sim 260$ mS/mm with ${\rm{I}}_{{\rm{ds}}}\sim 380$ mA/mm at ${\rm{V}}_{{\rm{ds}}}\,= \,{\rm{1\,V}}$, very promising RF performance was demonstrated. With a gate length of $2\,\mathrm{\mu} {\rm{m}}$, a cut-off frequency of ${\rm{f}}_{{\rm{T}}}\sim 2.5$ GHz and a maximum oscillation frequency of ${\rm{f}}_{{\rm{max}}}\sim 7.2$ GHz were obtained without de-embedding. This corresponds to an extrinsic ${\rm{f}}_{{\rm{T}}}{\rm{\cdot L}}_{{\rm{g}}}$ of ${\rm{5\,GHz\cdot }}\mu {\rm{m}}$, comparable to those reported for GFETs on other well-known flexible substrates. RF GFETs on the biointegrative MBC therefore show great promise for high-sensitivity and high-speed in vivo sensors and electronics applications.
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关键词
Graphene,Biomembranes,Silicon,Substrates,In vivo,Electrical resistance measurement,Logic gates
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