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One dimensional simulation of microscale DBD plasma

Hai Wang,Han Li,Li Wen

NEMS（2015）

Cited 4|Views3
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Abstract
An one dimensional multi-fluid plasma model is setup for micro-scale DBD plasma device. The micro-scale DBD plasma device has an inverted pyramidal cavity with metal-dielectric-metal structure. The features of Ar micro-plasma generated in micro-DBD device are numerical simulated through COMSOL software. The time evolutions of plasma parameters such as electrical potential, electron density, electron temperature are discussed in the simulation results.
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Key words
micro-DBD plasma, COMSOL, plasma model, Ar plasma
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