Fabrication Of Step-Edge Vertical-Channel Organic Transistors By Selective Electro-Spray Deposition

IEICE TRANSACTIONS ON ELECTRONICS(2015)

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Abstract
Step-edge vertical channel organic field-effect transistors (SVC-OFETs) with a very short channel have been fabricated by a novel selective electrospray deposition (SESD) method. We propose the SESD method for the fabrication of SVC-OFETs based on a 6,13-bis(triisopropyl-silylethynyl) pentacene (TIPS-pentacene) semiconductor layer formed by SESD. In the SESD method, an electric field is applied between the nozzle and selective patterned electrodes on a substrate. We demonstrated that the solution accumulates on the selected electrode pattern by controlling the voltage applied to the electrode.
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Key words
organic field-effect transistor, vertical channel transistor, TIPS-pentacene, electrospray deposition
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