Integration of nanostructured planar diffractive lenses dedicated to near infrared detection for CMOS image sensors.
OPTICS EXPRESS(2016)
Abstract
This paper deals with the integration of metallic and dielectric nanostructured planar lenses into a pixel from a silicon based CMOS image sensor, for a monochromatic application at 1.064 mu m. The first is a Plasmonic Lens, based on the phase delay through nanoslits, which has been found to be hardly compatible with current CMOS technology and exhibits a notable metallic absorption. The second is a dielectric Phase-Fresnel Lens integrated at the top of a pixel, it exhibits an Optical Efficiency (OE) improved by a few percent and an angle of view of 50 degrees. The third one is a metallic diffractive lens integrated inside a pixel, which shows a better OE and an angle of view of 24 degrees. The last two lenses exhibit a compatibility with a spectral band close to 1.064 mu m. (C) 2016 Optical Society of America
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Key words
diffractive lenses,cmos image sensors,infrared detection
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