GDNMOS: A new high voltage device for ESD protection in 28nm UTBB FD-SOI technology

2016 Joint International EUROSOI Workshop and International Conference Ultimate Integration Silicon(2016)

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Abstract
We propose a novel device (GDNMOS: Gated Diode merged NMOS) fabricated with 28nm UTBB FD-SOI high-k metal gate technology. Variable electrostatic doping (gate-induced) in diode and transistor body enables reconfigurable operation, in particular in thyristor mode. This innovative architecture demonstrates excellent capability for high-voltage protection while maintaining a latch-up free behavior.
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Key words
CMOS,ESD,FD-SOI,Gated Diode,MOSFET,SOI,Thyristor
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