Structural and Optical Characterization of Nonpolar (10-10) M-Inn/M-Gan Epilayers Grown by Pambe
JOURNAL OF CRYSTAL GROWTH(2016)
摘要
Plasma-assisted molecular beam epitaxy growth of (10–10) m-InN/(10–10) m-GaN was carried out on bare (10–10) m-sapphire substrate. The high resolution X-ray diffraction studies confirmed the orientation of the as-grown films. Nonpolar InN layer was grown at different growth temperatures ranging from 390°C to 440°C and the FWHM of rocking curve revealed good quality film at low temperatures. An in-plane relationship was established for the hetrostructures using phi-scan and a perfect alignment was found for the epilayers. Change of morphology of the films grown at different temperatures was observed using an atomic force microscopy technique showing the smoothest film grown at 400°C. InN optical band gap was found to be vary from 0.79–0.83eV from absorption spectra. The blue-shift of absorption edge was found to be induced by excess background electron concentration.
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关键词
Atomic force microscopy,High resolution X-ray diffraction,Molecular beam epitaxy,Nitrides,Semiconducting III-V materials
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